Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424136 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2022-08-23 |
| 11370078 | Chamber components with polished internal apertures | Jennifer Y. Sun, Vahid Firouzdor, David Koonce | 2022-06-28 |
| 11279661 | Heat treated ceramic substrate having ceramic coating | Jennifer Y. Sun, Ren-Guan Duan, Dmitry Lubomirsky | 2022-03-22 |