Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424136 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2022-08-23 |
| 11370078 | Chamber components with polished internal apertures | Jennifer Y. Sun, David Koonce, Biraja P. Kanungo | 2022-06-28 |