Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515163 | Low temperature graphene growth | Jialiang Wang, Susmit Singha Roy, Abhijit Basu Mallick | 2022-11-29 |
| 11437242 | Selective removal of silicon-containing materials | Jungmin Ko, Kwang Soo Kim, Thomas S. Choi | 2022-09-06 |
| 11408075 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Qiwei Liang | 2022-08-09 |
| 11355354 | Thermal deposition of doped silicon oxide | Zeqing Shen, Bo Qi, Abhijit Basu Mallick | 2022-06-07 |
| 11328909 | Chamber conditioning and removal processes | Hanshen Zhang, Zhenjiang Cui | 2022-05-10 |