Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11355354 | Thermal deposition of doped silicon oxide | Bo Qi, Abhijit Basu Mallick, Nitin K. Ingle | 2022-06-07 |
| 11276573 | Methods of forming high boron-content hard mask materials | Bo Qi, Abhijit Basu Mallick | 2022-03-15 |