Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328909 | Chamber conditioning and removal processes | Zhenjiang Cui, Nitin K. Ingle | 2022-05-10 |
| 11239061 | Methods and systems to enhance process uniformity | Saravjeet Singh, Alan Tso, Jingchun Zhang, Zihui Li, Dmitry Lubomirsky | 2022-02-01 |