Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488835 | Systems and methods for tungsten-containing film removal | Rohan Puligoru Reddy, Anchuan Wang | 2022-11-01 |
| 11328909 | Chamber conditioning and removal processes | Hanshen Zhang, Nitin K. Ingle | 2022-05-10 |