Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488835 | Systems and methods for tungsten-containing film removal | Zhenjiang Cui, Rohan Puligoru Reddy | 2022-11-01 |
| 11462411 | Gate contact over active regions | Gaurav Thareja, Keyvan Kashefizadeh, Xikun Wang, Sanjay Natarajan, Sean M. Seutter +1 more | 2022-10-04 |
| 11335565 | Systems and methods to form airgaps | Zhijun Chen, Lin Xu | 2022-05-17 |