Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11408075 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang | 2022-08-09 |
| 11264213 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park +4 more | 2022-03-01 |