Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469100 | Methods of post treating dielectric films with microwave radiation | Yong Sun, Praket P. Jha, Jingmei Liang, Dongqing Li, Shashank Sharma +2 more | 2022-10-11 |
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2022-03-15 |