Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367614 | Surface roughness for flowable CVD film | Jinrui GUO, Jingmei Liang, Praket P. Jha | 2022-06-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367614 | Surface roughness for flowable CVD film | Jinrui GUO, Jingmei Liang, Praket P. Jha | 2022-06-21 |