Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367614 | Surface roughness for flowable CVD film | Jingmei Liang, Praket P. Jha, Li Zhang | 2022-06-21 |
| 11226440 | Mask orientation | Yongan Xu, Rutger Meyer Timmerman Thijssen, Ludovic Godet | 2022-01-18 |