Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501969 | Direct extreme ultraviolet lithography on hard mask with reverse tone | Yann Mignot, Ekmini Anuja De Silva, Ashim Dutta, Chi-Chun Liu | 2022-11-15 |
| 11398409 | Method of forming a BEOL interconnect structure using a subtractive metal via first process | Yann Mignot, Hsueh-Chung Chen | 2022-07-26 |
| 11302533 | Selective gas etching for self-aligned pattern transfer | John C. Arnold, Sean D. Burns, Yann Mignot | 2022-04-12 |
| 11302571 | Cut integration for subtractive first metal line with bottom up second metal line | Somnath Ghosh, Hsueh-Chung Chen, Yann Mignot, Lawrence A. Clevenger | 2022-04-12 |
| 11237485 | System, software application, and method for lithography stitching | Christopher Dennis Bencher, Robert Jan Visser, Ludovic Godet | 2022-02-01 |
| 11226440 | Mask orientation | Rutger Meyer Timmerman Thijssen, Jinrui GUO, Ludovic Godet | 2022-01-18 |