Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11301748 | Automatic feature extraction from aerial images for test pattern sampling and pattern coverage inspection for lithography | Jing Sha, Martin Burkhardt | 2022-04-12 |
| 11302533 | Selective gas etching for self-aligned pattern transfer | John C. Arnold, Yann Mignot, Yongan Xu | 2022-04-12 |
| 11227793 | Self-aligned pattern formation for a semiconductor device | Lawrence A. Clevenger, Nelson Felix, Sivananda K. Kanakasabapathy, Christopher J. Penny, Nicole Saulnier | 2022-01-18 |