Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469097 | Carbon hard masks for patterning applications and methods related thereto | Eswaranand Venkatasubramanian, Yang Yang, Pramit Manna, Kartik Ramaswamy, Abhijit Basu Mallick | 2022-10-11 |
| 11430801 | Methods and apparatus for three dimensional NAND structure fabrication | Mukund Srinivasan, Tomohiko Kitajima, Chang-Seok Kang, Sung-Kwan Kang, Gill Yong Lee +1 more | 2022-08-30 |
| 11335690 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Abhijit Basu Mallick, Pramit Manna, Nancy Fung, Eswaranand Venkatasubramanian +2 more | 2022-05-17 |