Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508563 | Methods and apparatus for processing a substrate using improved shield configurations | Soundarrajan JEMBULINGAM, Jeonghoon Oh | 2022-11-22 |
| 11450511 | Methods and apparatus for zone control of RF bias for stress uniformity | Lizhong Sun, Yi Yang, Chong Ma, Xiaodong Yang | 2022-09-20 |