Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508563 | Methods and apparatus for processing a substrate using improved shield configurations | Jian J. Chen, Jeonghoon Oh | 2022-11-22 |
| 11251067 | Pedestal lift for semiconductor processing chambers | Brian T. West, Miroslav Gelo, Yan Rozenzon, Roger M. Johnson, Mark William Covington +2 more | 2022-02-15 |