| 11511388 |
Polishing system with support post and annular platen or polishing pad |
Paul D. Butterfield, Thomas H. Osterheld, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker |
2022-11-29 |
| 11508563 |
Methods and apparatus for processing a substrate using improved shield configurations |
Soundarrajan JEMBULINGAM, Jian J. Chen |
2022-11-22 |
| 11469080 |
Magnetron assembly having coolant guide for enhanced target cooling |
Dinkesh HUDERI SOMANNA, Brian T. West |
2022-10-11 |
| 11453099 |
Retaining ring having inner surfaces with features |
Steven Mark Reedy, Simon Yavelberg, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more |
2022-09-27 |
| 11440159 |
Edge load ring |
Uday Pai, Van H. Nguyen |
2022-09-13 |
| 11400560 |
Retaining ring design |
Charles C. Garretson, Eric Lau, Andrew J. Nagengast, Steven M. Zuniga, Edwin C. Suarez +2 more |
2022-08-02 |
| 11370079 |
Reinforcement ring for carrier head with flexible membrane |
Jamie Stuart Leighton |
2022-06-28 |
| 11338409 |
Three-zone carrier head and flexible membrane |
Jamie Stuart Leighton |
2022-05-24 |
| 11260500 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2022-03-01 |
| 11241769 |
Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes |
David Masayuki Ishikawa, Garrett H. Sin, Charles C. Garretson, Huanbo Zhang, Chia-Ling PAI +2 more |
2022-02-08 |
