Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11400560 | Retaining ring design | Jeonghoon Oh, Charles C. Garretson, Eric Lau, Andrew J. Nagengast, Steven M. Zuniga +2 more | 2022-08-02 |
| 11282755 | Asymmetry correction via oriented wafer loading | Eric Lau, Charles C. Garretson, Zhize Zhu | 2022-03-22 |
| 11241769 | Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes | David Masayuki Ishikawa, Jeonghoon Oh, Garrett H. Sin, Charles C. Garretson, Chia-Ling PAI +2 more | 2022-02-08 |