Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511390 | Pivotable substrate retaining ring | Jay Gurusamy, Andrew J. Nagengast | 2022-11-29 |
| 11511388 | Polishing system with support post and annular platen or polishing pad | Paul D. Butterfield, Thomas H. Osterheld, Jeonghoon Oh, Shou-Sung Chang, Fred C. Redeker | 2022-11-29 |
| 11453099 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more | 2022-09-27 |
| 11400560 | Retaining ring design | Jeonghoon Oh, Charles C. Garretson, Eric Lau, Andrew J. Nagengast, Edwin C. Suarez +2 more | 2022-08-02 |
| 11389925 | Offset head-spindle for chemical mechanical polishing | Jay Gurusamy, Bum Jick Kim, Danielle Loi | 2022-07-19 |
| 11344991 | Retainer for chemical mechanical polishing carrier head | Andrew J. Nagengast | 2022-05-31 |
| 11325223 | Carrier head with segmented substrate chuck | Jay Gurusamy | 2022-05-10 |
| 11289347 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Ekaterina A. Mikhaylichenko +2 more | 2022-03-29 |
| 11260500 | Retaining ring with shaped surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2022-03-01 |