Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511390 | Pivotable substrate retaining ring | Steven M. Zuniga, Andrew J. Nagengast | 2022-11-29 |
| 11389925 | Offset head-spindle for chemical mechanical polishing | Steven M. Zuniga, Bum Jick Kim, Danielle Loi | 2022-07-19 |
| 11325223 | Carrier head with segmented substrate chuck | Steven M. Zuniga | 2022-05-10 |