Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511390 | Pivotable substrate retaining ring | Steven M. Zuniga, Jay Gurusamy | 2022-11-29 |
| 11453099 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu +1 more | 2022-09-27 |
| 11400560 | Retaining ring design | Jeonghoon Oh, Charles C. Garretson, Eric Lau, Steven M. Zuniga, Edwin C. Suarez +2 more | 2022-08-02 |
| 11344991 | Retainer for chemical mechanical polishing carrier head | Steven M. Zuniga | 2022-05-31 |