Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511388 | Polishing system with support post and annular platen or polishing pad | Paul D. Butterfield, Jeonghoon Oh, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2022-11-29 |
| 11507824 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Nicholas A. Wiswell, Jun Qian | 2022-11-22 |
| 11453097 | Chemical mechanical polishing apparatus and methods | Rajeev Bajaj, Hung Chih Chen, Terrance Y. Lee | 2022-09-27 |