Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11507824 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Jun Qian, Thomas H. Osterheld | 2022-11-22 |
| 11478894 | Polishing fluid additive concentration measurement apparatus and methods related thereto | — | 2022-10-25 |