Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D947802 | Replaceable substrate carrier interfacing film | Clinton SAKATA | 2022-04-05 |
| 11289347 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2022-03-29 |