Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289347 | Non-contact clean module | Jagan Rangarajan, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2022-03-29 |