Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11241769 | Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes | Jeonghoon Oh, Garrett H. Sin, Charles C. Garretson, Huanbo Zhang, Chia-Ling PAI +2 more | 2022-02-08 |