Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469080 | Magnetron assembly having coolant guide for enhanced target cooling | Dinkesh HUDERI SOMANNA, Jeonghoon Oh | 2022-10-11 |
| 11251067 | Pedestal lift for semiconductor processing chambers | Miroslav Gelo, Yan Rozenzon, Roger M. Johnson, Mark William Covington, Soundarrajan JEMBULINGAM +2 more | 2022-02-15 |