Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11370079 | Reinforcement ring for carrier head with flexible membrane | Jeonghoon Oh | 2022-06-28 |
| 11338409 | Three-zone carrier head and flexible membrane | Jeonghoon Oh | 2022-05-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11370079 | Reinforcement ring for carrier head with flexible membrane | Jeonghoon Oh | 2022-06-28 |
| 11338409 | Three-zone carrier head and flexible membrane | Jeonghoon Oh | 2022-05-24 |