Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450511 | Methods and apparatus for zone control of RF bias for stress uniformity | Lizhong Sun, Yi Yang, Jian J. Chen, Xiaodong Yang | 2022-09-20 |
CM
Chong Ma
Overall (2022): #497,076 of 548,613Top 95%
1
Patents 2022