Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469107 | Highly etch selective amorphous carbon film | Rajesh Prasad, Sarah Michelle Bobek, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more | 2022-10-11 |
| 11430641 | Processing systems and methods to control process drift | Vivien Chua, Zhijun Jiang, Fang Ruan, Diwakar Kedlaya | 2022-08-30 |
| 11322352 | Nitrogen-doped carbon hardmask films | Xiaoquan Min, Lu Xu, Kwangduk Douglas Lee | 2022-05-03 |