Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515170 | 3D NAND etch | Shishi Jiang, Pramit Manna, Bo Qi, Abhijit Basu Mallick, Rui Cheng +2 more | 2022-11-29 |
| 11469107 | Highly etch selective amorphous carbon film | Rajesh Prasad, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Hidetaka Oshio +4 more | 2022-10-11 |