Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469107 | Highly etch selective amorphous carbon film | Rajesh Prasad, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Harry Whitesell, Hidetaka Oshio +4 more | 2022-10-11 |
| 11322352 | Nitrogen-doped carbon hardmask films | Xiaoquan Min, Lu Xu, Prashant Kumar Kulshreshtha | 2022-05-03 |
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2022-03-15 |