Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410881 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Tae Hong Ha, Xianmin Tang | 2022-08-09 |
| 11270911 | Doping of metal barrier layers | Christina L. Engler, Gang Shen, Feng Chen, Tae Hong Ha, Xianmin Tang | 2022-03-08 |