Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527437 | Methods and apparatus for intermixing layer for enhanced metal reflow | Lanlan Zhong, Fuhong Zhang, Gang Shen, Feng Chen, Rui Li +2 more | 2022-12-13 |
| 11424132 | Methods and apparatus for controlling contact resistance in cobalt-titanium structures | Takashi Kuratomi, Avgerinos V. Gelatos, Xuesong Lu, Szuheng Ho, Wei Lei +3 more | 2022-08-23 |
| 11417568 | Methods for selective deposition of tungsten atop a dielectric layer for bottom up gapfill | Wei Lei, Yi Xu, Yu Lei, Raymond Hung, Shirish A. PETHE | 2022-08-16 |
| 11410881 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Xianmin Tang, Lu Chen | 2022-08-09 |
| 11270911 | Doping of metal barrier layers | Lu Chen, Christina L. Engler, Gang Shen, Feng Chen, Xianmin Tang | 2022-03-08 |