Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515200 | Selective tungsten deposition within trench structures | Yi Xu, Yufei Hu, He Ren, Yu Lei, Shi YOU | 2022-11-29 |
| 11421322 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yu Lei, Yi Xu, Pingyan Lei, Dien-Yeh Wu +2 more | 2022-08-23 |
| 11404313 | Selective tungsten deposition at low temperatures | Yi Xu, Yufei Hu, Yu Lei, Da He, Jiajie Cen | 2022-08-02 |
| 11355391 | Method for forming a metal gapfill | Xi Cen, Feiyue Ma, Kai Wu, Yu Lei, Yi Xu +13 more | 2022-06-07 |