Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421322 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yu Lei, Yi Xu, Kazuya Daito, Pingyan Lei +2 more | 2022-08-23 |
| 11335591 | Thermal process chamber lid with backside pumping | Anqing Cui, Wei V. Tang, Yixiong Yang, Bo Wang | 2022-05-17 |
| RE48994 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Faruk Gungor, Paul F. Ma, David Chu +2 more | 2022-03-29 |