Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421322 | Blocker plate for use in a substrate process chamber | Yu Lei, Yi Xu, Kazuya Daito, Pingyan Lei, Dien-Yeh Wu +2 more | 2022-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421322 | Blocker plate for use in a substrate process chamber | Yu Lei, Yi Xu, Kazuya Daito, Pingyan Lei, Dien-Yeh Wu +2 more | 2022-08-23 |