Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515155 | Methods for enhancing selectivity in SAM-based selective deposition | Chang Ke, Michael S. Jackson, Liqi Wu, Lei Zhou, Shuyi Zhang +3 more | 2022-11-29 |
| 11421318 | Methods and apparatus for high reflectivity aluminum layers | Jacqueline S. Wrench, Liqi Wu, Hsiang-Ning Wu, Sang Ho Yu, Fuqun Grace Vasiknanonte +1 more | 2022-08-23 |
| 11424119 | Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer | Eric James Shero, Bed Prasad Sharma, Shankar Swaminathan | 2022-08-23 |
| RE48994 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Faruk Gungor, David Chu, Chien-Teh Kao +2 more | 2022-03-29 |