Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443975 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie +7 more | 2022-09-13 |
| 11424119 | Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer | Eric James Shero, Paul F. Ma, Bed Prasad Sharma | 2022-08-23 |
| 11295980 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Kiran Shrestha, Chiyu Zhu, Henri Jussila, Qi Xie | 2022-04-05 |
| 11286558 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Bhushan Zope, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2022-03-29 |