Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515124 | Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression | Michael John Selep, Patrick Breiling, Timothy Scott Thomas, David William Kamp, Sean M. Donnelly | 2022-11-29 |
| 11482436 | Rotational indexer with additional rotational axes | Richard M. Blank | 2022-10-25 |
| 11443975 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Paul Konkola, Adrien LaVoie, Chloe Baldasseroni +7 more | 2022-09-13 |
| 11434567 | Substrate processing system with tandem source activation for CVD | Adrien LaVoie, Hu Kang | 2022-09-06 |
| 11387136 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2022-07-12 |
| 11264207 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Vince Burkhart | 2022-03-01 |
| 11258420 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni | 2022-02-22 |