Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11479856 | Multi-cycle ALD process for film uniformity and thickness profile modulation | Purushottam Kumar, Adrien LaVoie, Jun Qian, Tuan Nguyen, Ye Wang | 2022-10-25 |
| 11434567 | Substrate processing system with tandem source activation for CVD | Adrien LaVoie, Karl Leeser | 2022-09-06 |