Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443975 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Adrien LaVoie, Chloe Baldasseroni +7 more | 2022-09-13 |
| 11387136 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Karl Leeser, Easwar Srinivasan | 2022-07-12 |
| 11239100 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Richard M. Blank, Peter Thaulad | 2022-02-01 |