Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443975 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Karl Leeser, Paul Konkola, Adrien LaVoie, Chloe Baldasseroni +7 more | 2022-09-13 |
| 11332824 | Systems and methods for reducing effluent build-up in a pumping exhaust system | Antonio Xavier, Steven Goza, Adrien LaVoie, Joseph Nesmith | 2022-05-17 |
| 11236422 | Multi zone substrate support for ALD film property correction and tunability | Michael Philip Roberts, Pulkit Agarwal, Aaron Bingham, Ashish Saurabh, Ravi Kumar +1 more | 2022-02-01 |
| 11232966 | Electrostatic chucking pedestal with substrate backside purging and thermal sinking | Timothy Scott Thomas, Patrick Breiling, Vincent E. Burkhart | 2022-01-25 |