Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11535936 | Dual gas feed showerhead for deposition | Eric Russell Madsen | 2022-12-27 |
| 11236422 | Multi zone substrate support for ALD film property correction and tunability | Ramesh Chandrasekharan, Pulkit Agarwal, Aaron Bingham, Ashish Saurabh, Ravi Kumar +1 more | 2022-02-01 |