Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11232966 | Electrostatic chucking pedestal with substrate backside purging and thermal sinking | Timothy Scott Thomas, Patrick Breiling, Ramesh Chandrasekharan | 2022-01-25 |
VB
Vincent E. Burkhart
Overall (2022): #219,657 of 548,613Top 45%
1
Patents 2022