Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515124 | Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression | Michael John Selep, Patrick Breiling, Karl Leeser, David William Kamp, Sean M. Donnelly | 2022-11-29 |
| 11469084 | High temperature RF connection with integral thermal choke | Vince Burkhart, Joel Hollingsworth, David French, Damien Slevin | 2022-10-11 |
| 11232966 | Electrostatic chucking pedestal with substrate backside purging and thermal sinking | Patrick Breiling, Ramesh Chandrasekharan, Vincent E. Burkhart | 2022-01-25 |