Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521869 | Reduced footprint platform architecture with linear vacuum transfer module | Richard H. Gould | 2022-12-06 |
| 11512393 | Dynamic sheath control with edge ring lift | Jacob L. Hiester, Curtis Bailey, Michael J. Janicki | 2022-11-29 |
| 11482436 | Rotational indexer with additional rotational axes | Karl Leeser | 2022-10-25 |
| 11239100 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Peter Thaulad, Paul Konkola | 2022-02-01 |