Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512393 | Dynamic sheath control with edge ring lift | Jacob L. Hiester, Richard M. Blank, Michael J. Janicki | 2022-11-29 |
| 11441222 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Nick Ray Linebarger, Jr. | 2022-09-13 |
| 11365479 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Tony Kaushal, Krishna Birru +11 more | 2022-06-21 |