Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11427908 | Manifold valve for multiple precursors | Nagraj Shankar | 2022-08-30 |
| 11365479 | Ex situ coating of chamber components for semiconductor processing | Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal, Krishna Birru +11 more | 2022-06-21 |