Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11365479 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Krishna Birru +11 more | 2022-06-21 |